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ECM Greentech offers a range of furnaces and processes for semiconductor in several devices (power devices, sensors, mems, optoelectronics), from wafer processing for R&D to Mass Production. Our experts support projects from equipment design & engineering, process challenges, up to Technology integration challenges. Feel free to submit your project and engage with our teams.

Wafer processing
Furnaces.

Tubestar

Materials
  • Ceramics
  • Glass
  • III-V
  • II-VI
  • Sapphiire
  • Superconductors
  • GaN
  • SiC
  • Metal
  • Quartz
  • Silicon

DF Series

Materials
  • Si
  • SiC
  • GaN
  • Sapphire
  • ceramic
  • quartz
  • metal

VAR Series

Materials
  • Ceramics
  • Glass
  • III-V
  • II-VI
  • Sapphiire
  • Superconductors
  • GaN
  • SiC
  • Metal
  • Quartz
  • Silicon

Memslab

Materials
  • Si
  • SiC
  • GaN
  • Sapphire
  • ceramic
  • quartz
  • metal

Actistar

Materials
  • SiC wafer
  • SiC boule

Oxistar

Materials
  • SiC wafer

Discover our other
furnaces for PV & Crystal Growth

PV manufacturing equipment

ECM Greentech specializes in the design and commissioning of turnkey equipment and lines for the manufacture of PV panels.

PV manufacturing equipment
pv manufacturing

Crystal Growth furnaces

Discover our full range of furnaces for Crystal Growth applications, with the Cyberstar pulling head technology.

Crystal Growth furnaces
yag crystal growth