Skip to main content

ECM Greentech offers a range of furnaces and processes for semiconductor in several devices (power devices, sensors, mems, optoelectronics), from wafer processing for R&D to mass production. Our experts are also specialized in silicon carbide ingot growth. Feel free to submit your project and engage with our teams.

Wafer processing
Furnaces.

Tubestar

Materials
  • Ceramics
  • Glass
  • III-V
  • II-VI
  • Sapphiire
  • Superconductors
  • GaN
  • SiC
  • Metal
  • Quartz
  • Silicon

DF Series

Materials
  • Si
  • SiC
  • GaN
  • Sapphire
  • ceramic
  • quartz
  • metal
vertical furnace

VAR Series

Materials
  • Ceramics
  • Glass
  • III-V
  • II-VI
  • Sapphiire
  • Superconductors
  • GaN
  • SiC
  • Metal
  • Quartz
  • Silicon

Memslab

Materials
  • Si
  • SiC
  • GaN
  • Sapphire
  • ceramic
  • quartz
  • metal

Actistar

Materials
  • SiC
  • GaN

Oxistar

Materials
  • SiC
  • GaN

Discover our other
furnace ranges.

PV manufacturing equipment

ECM Greentech specializes in the design and commissioning of turnkey equipment and lines for the manufacture of PV panels.

PV manufacturing equipment
pv manufacturing

Crystal Growth furnaces

Discover our full range of furnaces for Crystal Growth applications, with the Cyberstar pulling head technology.

Crystal Growth furnaces.
yag crystal growth