Semco TUBESTAR is the compact batch-type, single or multi-chambers horizontal furnace offered by ECM Greentech. Key characteristics of this furnace line are: advanced solar cell processing combined with industrial process control, integration modularity, and a user-friendly interface. Each populated chamber can be independently configured and operated in a large range of atmospheric, reduced or low pressure processes. The TUBESTAR furnace can also handle multiple gases and liquid precursors with a temperature range from 200 to 1300°C. Its modular design allows to meet a large range of clean thermal treatment for universities, research laboratories, or small production facilities.
TS156-XT: up to 162mm x 162mm (M0-M4) wafer size
TS166-XT: up to 166mm x 166mm (M4-M6) wafer size
X = chamber/level qty from 1 to 4