ECM Greentech offers its expertise for advanced processes and equipment installations in the semiconductor, renewable energies and crystal growth fields. Part of the ECM GROUP, choosing ECM Greentech brands of equipment is to benefit from the multi competences teams from this industrial furnace manufacturer group. With a strong heritage of tailored solutions, we provide more than just an equipment. We provide the link between the equipment, its processes and the related Technology Integration to ensure the best fit for your application and consequently the optimum time to market for your products.
Our activity in
semiconductor field.
Wafer processing
equipment for R&D
Discover our range of compact & flexible equipment, with Horizontal & vertical configurations. Perfectly adapted for small laboratories, research facilities or universities for R&D and Pilot production capabilities.
Wafer processing equipment for Mass production
Discover our range of Mass Production equipment, horizontal & vertical configurations. From 4’’ to 12’’ chambers up to 400 wafers batch for mass production including high processes flexibility tailored for your application.
A unique collaboration for your manufacturing process
Choosing ECM as partner is the guaranty to benefit from a unique collaborative approach in order to define and establish the right equipment and processes to upgrade your manufacturing operations.
ECM Greentech is a worldwide recognized equipment manufacturer in several applications including semiconductor. Innovation is our driver to always offer the best combination of an efficient equipment together with the best performing processes.
The commitment from our teams to continuously work closely with our customers and address all their needs make sure we always provide the best fitted service. ECM does always offer more than just an equipment, a perfectly fitted solution enabling your manufacturing line to be more efficient, in a continuous closely and dedicated relationship.
Semiconductor segments
we adress.

Power devices
Electronical components including power transistors, thyristors, diodes and switching modules that are found in many systems : electrical powers, motors etc.

Sensors
Devices for detecting and measuring physical parameters and converting them into signals that can be used by electronic systems. These devices are used in many fields, including automotive, industry, healthcare etc.

Mems
Microelectromechanical systems that integrate mechanical and electronic components. These devices are used in sensors, actuators and other measurement applications.

Optoelectronics - Photonics
Optoelectronics cover the electronic devices that interact with light, such as light-emitting diodes (LEDs), optical sensors, lasers and photodiodes.

Our semiconductor
furnaces.
Whether you are looking for a semiconductor equipment for R&D, pilot or mass production, ECM provides you with the most adapted manufacturing equipment. Our products portfolio includes vertical and horizontal furnaces, up to 300mm wafers size, with equipment based on manual or fully automated loading, going up to 4 independent tubes and up to 400 wafers per tube.
SiC & Sapphire
Ingot Growth.
Thanks to the synergy of skills, With a strong R&D focus, ECM Greentech is now offering equipment for SiC wafers processing systems. We have combined our knowledge of crystal growth and heat treatment to develop our PVT furnace. This equipment enables the growth of silicon carbide for the production of SiC wafers for the semiconductor industry.

Other semiconductor
solutions & equipment by ECM.
Robotic integration :
wafer handling solutions
Have a look on our piece-by-piece wafer handling solutions or larger scale operation with our cassette loading solutions by ECM Robotics.

RTP
Systems
Benefit from the expertise of Annealsys – RTP furnaces manufacturer and discover their products for all RTP / RTCVD processes.
