Semco OXISTAR is the compact batch-type, vertical Single very-high-temperature furnace, offered by ECM Greentech, and dedicated for Very-high-temperature oxidation of SiC wafers. Key characteristics of this furnace line are: high performance temperature treatment combined with industrial process control, integration modularity, and a user-friendly interface. The applied heating and technology and chamber design alloys best clean oxyde performance. The ACTISTAR furnace can also handle multiple gases from 850 mbar to atmospheric pressure with a temperature range from 200 to 1500°C. Its flexible design allows to meet a large range of clean & safe thermal treatment for R&D and Pilot production facilities.
OS150: up to 150mm wafer size
OS200: up to 200mm wafer size