ECM Greentech offers its expertise for advanced processes and equipment installations in the semiconductor, renewable energies and crystal growth fields. Part of the ECM GROUP, choosing ECM Greentech brands of equipment is to benefit from the expertise of multi competences teams from this industrial furnace manufacturer group. With a strong heritage in silicon crystallization furnaces, we are expert in semiconductor equipment and applications including Si & SiC wafers production furnaces and SiC ingot growing.
Our activity in
semiconductor field.
Wafer processing
equipment for R&D
Discover our range of equipments – both horizontal & vertical configurations perfectly adapted for small laboratories, research facilities or universities for R&D and small production capabilities.
Wafer processing equipment for Mass production
Discover our range of equipments – up to 4 heating chambers up to 200 wafers per it for mass production including high processes flexibility.
A unique collaboration for your manufacturing process
Choosing ECM as partner is the guaranty to benefit from a unique collaborative approach in order to define and establish the right equipment and process for upgrading your manufacturing operations.
ECM Greentech is a recognized equipment manufacturer in several applications including semiconductor. Innovation has always been a driver to always offer the most efficient and innovative equipment & processes. Thus enabling the company to be part of European initiatives such as the fast lane project.
This projects gathers many semiconductors actors in order to support the European semiconductor chips manufacturing, improve European manufacturing capabilities, promote the innovation and strengthen the European semiconductor sovereignty.
Our teams work closely with you to go deeper in your needs and make sure to understand how we can provide you the best service. ECM does not just offer you an equipment, but an overall turnkey line solution enabling your manufacturing line to be more efficient, in a closely and dedicated relationship.
Semiconductor segments
we adress.
Power devices
Electronical components including power transistors, thyristors, diodes and switching modules that are found in many systems : electrical powers, motors etc.
Sensors
Devices for detecting and measuring physical parameters and converting them into signals that can be used by electronic systems. These devices are used in many fields, including automotive, industry, healthcare etc.
Mems
Microelectromechanical systems that integrate mechanical and electronic components. These devices are used in sensors, actuators and other measurement applications.
Optoelectronics
Optoelectronics cover the electronic devices that interact with light, such as light-emitting diodes (LEDs), optical sensors, lasers and photodiodes.
Our semiconductor
furnaces.
Whether you are looking for a semiconductor equipment for R&D, pilot or mass production, ECM provides you with the most adapted manufacturing equipment. Our products portfolio includes vertical and horizontal furnace – up to 200mm wafers. With semiconductor equipment going up to 4 independant tubes up to 400 wafers per tube, we know how to address both small, medium and large production.
SiC
Ingot Growth.
Thanks to the synergy of skills, With a strong R&D focus, ECM Greentech is now offering equipment for SiC wafers processing systems. We have combined our knowledge of crystal growth and heat treatment to develop our PVT furnace. This equipment enables the growth of silicon carbide for the production of SiC wafers for the semiconductor industry.
Other semiconductor
solutions & equipment by ECM.
Robotic integration :
wafer handling solutions
Have a look on our piece-by-piece wafer handling solutions or larger scale operation with our cassette loading solutions by ECM Robotics.
RTP
Systems
Benefit from the expertise of Annealsys – RTP furnaces manufacturer and discover their products for all RTP / RTCVD processes.
