VS Series
BATCH TYPE VERTICAL FURNACE

VS-SERIES are compact batch-type, single or dual reactor vertical furnaces offered by ECM Greentech. Key characteristics of this furnace line are : advanced semiconductor wafer processing combined with industrial high-end process control, integration modularity, and a user-friendly interface. Each populated reactor can be independently configured and operated in a large range of atmospheric, sub-atmospheric or low pressure processes. The VS SERIES can also handle multiple gases and liquid precursors with a temperature range from 200 to 1300°C. Its modular design allows to meet a large range of fully automated single or dual reactors.

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Features

Effective dimensions	Equipment available for 150 – 200 – 300 mm
Materials	Si – SiC – GaN – Sapphire – Quartz – Glass – Metal – III V – II VI – Superconductors
Features	Equipment capabilities : Modular, Flexible & compact footprint 1 to 2 independent process chamber Reactors from 6’’ up to 12’’ wafer size Configurable from 25/50 to 100/150 wafers per chamberProcess flexibility : Atmospheric, reduced and low pressure (LYDOP/LYTOX, LPCVD) Wide range of Process gases and multi-process capabilities Excellent process precision and repeatability Fully automatic loading & traceabilityMachine design : High performance and lifetime process technology External, internal, cascade, feedforward and selectable PID temperature control All furnace components Hub connected Industrial Process PLC & Safety PLC Ergonomic Windows® based SmartCore supervision CE certified & SEMI S2 compliant
Applications	Microelectronics – Optoelectronics – Power Devices – Aeronautics – Sensors – Medical
Integration	Possibility of robotics integration and software controled growth process