ECM Greentech offers a range of furnaces and processes for semiconductor in several devices (power devices, sensors, mems, optoelectronics), from wafer processing for R&D to mass production. Our experts are also specialized in silicon carbide ingot growth. Feel free to submit your project and engage with our teams.
Wafer processing
Furnaces.
Tubestar
Materials
- Ceramics
- Glass
- III-V
- II-VI
- Sapphiire
- Superconductors
- GaN
- SiC
- Metal
- Quartz
- Silicon
Applications
- Annealing
- Sintering
- Diffusion
- LPCVD
- Oxidation
- Glass-to-metal sealing
DF Series
Materials
- Si
- SiC
- GaN
- Sapphire
- ceramic
- quartz
- metal
Applications
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VAR Series
Materials
- Ceramics
- Glass
- III-V
- II-VI
- Sapphiire
- Superconductors
- GaN
- SiC
- Metal
- Quartz
- Silicon
Applications
- Annealing
- Sintering
- Diffusion
- LPCVD
- Oxidation
- Glass-to-metal sealing
Actistar
Materials
- SiC
- GaN
Applications
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Oxistar
Materials
- SiC
- GaN
Applications
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VS Series
Materials
- Ceramics
- Glass
- III-V
- II-VI
- Sapphiire
- Superconductors
- GaN
- SiC
- Metal
- Quartz
- Silicon
Applications
- Annealing
- Sintering
- Diffusion
- LPCVD
- Oxidation
- Glass-to-metal sealing
Discover our other
furnace ranges.
PV manufacturing equipment
ECM Greentech specializes in the design and commissioning of turnkey equipment and lines for the manufacture of PV panels.
Crystal Growth furnaces
Discover our full range of furnaces for Crystal Growth applications, with the Cyberstar pulling head technology.
